Beilstein J. Nanotechnol.2012,3, 597–619, doi:10.3762/bjnano.3.70
the field of focused electron beam induced deposition.
Keywords: atomic force microscopy; binary systems; electron beam induced deposition; granular metals; microHallmagnetometry; radiation-induced nanostructures; strain sensing; Review
Introduction
Focused electron beam induced deposition (FEBID